Chemical vapour deposition cvd involves the deposition of thin solid films from chemical precursors in the vapour phase and encompasses a variety of deposition techniques including a range of thermal processes plasma enhanced cvd pecvd photon initiated cvd and atomic layer deposition ald. Royal society of chemistry cambridge 2008 600 pp hardcover gbp 19995 isbn 978 0854044658 chemical vapour deposition precursors processes and applications. Pdf on sep 28 2009 graziella malandrino published chemical vapour deposition precursors processes and applications edited by anthony c jones and michael l hitchman find read and cite . Anthony c jones and michael l hitchman in the broadest sense chemical vapour deposition cvd involves the formation of a thin solid film on a substrate material by a chemical reaction of vapour phase precursors it can thus be distinguished from physical vapour deposition pvd processes such as evaporation and reactive sputtering whi
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